Permanent URL to this publication: http://dx.doi.org/10.5167/uzh-10389
Bartolf, H; Engel, A; Schilling, A; Il'in, K; Siegel, M (2008). Fabrication of metallic structures with lateral dimensions less than 15 nm and jc(T)-measurements in NbN micro- and nanobridges. Physica C: Superconductivity, 468(7-10):793-796.
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We report about a process that enables us to manufacture nm-sized structures that are characterized in a four-point resistivity measurement. To define the nanostructures, we employ either a lift-off deposition process or a dry etching process. With the lift-off deposition, we were able to define line widths below 15 nm spatial dimension. The same technique allowed the fabrication of a current-carrying bridge with ≈30 nm × 10 nm cross section. The etch-process step allowed us to generate a superconducting meander structure covering an area of ≈13.5 μm × 10.5 μm. We also present critical-current measurements vs. temperature on sub-μm and μm sized bridges prepared by a different technique. These data support the idea of a geometrical edge barrier for vortex entry into sub-μm wide bridges.
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|Item Type:||Journal Article, refereed, original work|
|Communities & Collections:||07 Faculty of Science > Physics Institute|
|Dewey Decimal Classification:||530 Physics|
|Date:||1 April 2008|
|Deposited On:||10 Feb 2009 12:22|
|Last Modified:||13 Nov 2014 15:02|
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