Permanent URL to this publication: http://dx.doi.org/10.5167/uzh-27028
Vila-Comamala, J; Jefimovs, K; Pilvi, T; Ritala, M; Sarkar, S S; Solak, H H; Guzenko, V A; Stampanoni, M; Marone, F; Raabe, J; Tzvetkov, G; Fink, R H; Grolimund, D; Borca, C N; Kaulich, B; David, C (2009). Advanced X-ray diffractive optics. Journal of Physics: Conference Series, 186:012078.
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X-ray microscopy greatly bene�ts from the advances in x-ray optics. At the Paul Scherrer Institut, developments in x-ray di�ractive optics include the manufacture and optimization of Fresnel zone plates (FZPs) and di�ractive optical elements for both soft and hard x-ray regimes. In particular, we demonstrate here a novel method for the production of ultra-high resolution FZPs. This technique is based on the deposition of a zone plate material (iridium) onto the sidewalls of a prepatterned template structure (silicon) by atomic layer deposition. This approach overcomes the limitations due to electron-beam writing of dense patterns in FZP fabrication and provides a clear route to push the resolution into sub-10 nm regime. A FZP fabricated by this method was used to resolve test structures with 12 nm lines and spaces at the scanning transmission x-ray microscope of the PolLux beamline of the Swiss Light Source at 1.2 keV photon energy.
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|Item Type:||Journal Article, refereed, original work|
|Communities & Collections:||04 Faculty of Medicine > Institute of Biomedical Engineering|
|Dewey Decimal Classification:||170 Ethics
610 Medicine & health
|Deposited On:||17 Feb 2010 09:15|
|Last Modified:||27 Nov 2013 22:24|
|Publisher:||Institute of Physics Publishing|
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