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Fabrication of metallic structures with lateral dimensions less than 15 nm and jc(T)-measurements in NbN micro- and nanobridges


Bartolf, H; Engel, A; Schilling, A; Il'in, K; Siegel, M (2008). Fabrication of metallic structures with lateral dimensions less than 15 nm and jc(T)-measurements in NbN micro- and nanobridges. Physica C: Superconductivity, 468(7-10):793-796.

Abstract

We report about a process that enables us to manufacture nm-sized structures that are characterized in a four-point resistivity measurement. To define the nanostructures, we employ either a lift-off deposition process or a dry etching process. With the lift-off deposition, we were able to define line widths below 15 nm spatial dimension. The same technique allowed the fabrication of a current-carrying bridge with ≈30 nm × 10 nm cross section. The etch-process step allowed us to generate a superconducting meander structure covering an area of ≈13.5 μm × 10.5 μm. We also present critical-current measurements vs. temperature on sub-μm and μm sized bridges prepared by a different technique. These data support the idea of a geometrical edge barrier for vortex entry into sub-μm wide bridges.

Abstract

We report about a process that enables us to manufacture nm-sized structures that are characterized in a four-point resistivity measurement. To define the nanostructures, we employ either a lift-off deposition process or a dry etching process. With the lift-off deposition, we were able to define line widths below 15 nm spatial dimension. The same technique allowed the fabrication of a current-carrying bridge with ≈30 nm × 10 nm cross section. The etch-process step allowed us to generate a superconducting meander structure covering an area of ≈13.5 μm × 10.5 μm. We also present critical-current measurements vs. temperature on sub-μm and μm sized bridges prepared by a different technique. These data support the idea of a geometrical edge barrier for vortex entry into sub-μm wide bridges.

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Additional indexing

Item Type:Journal Article, refereed, original work
Communities & Collections:07 Faculty of Science > Physics Institute
Dewey Decimal Classification:530 Physics
Language:English
Date:1 April 2008
Deposited On:10 Feb 2009 12:22
Last Modified:06 Dec 2017 16:53
Publisher:Elsevier
ISSN:0921-4534
Publisher DOI:https://doi.org/10.1016/j.physc.2007.11.049

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