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Ultra-thin NbN films on Si: crystalline and superconducting properties


Ilin, K; Schneider, R; Gerthsen, D; Engel, A; Bartolf, H; Schilling, A; Semenov, A; Huebers, H W; Freitag, B; Siegel, M (2008). Ultra-thin NbN films on Si: crystalline and superconducting properties. Journal of Physics: Conference Series, 97:012045.

Abstract

We present results on superconducting and crystalline properties of NbN films with a thickness smaller than 10 nm. The films were deposited using reactive magnetron sputtering on heated silicon substrates. Zero resistance critical temperatures of about 9 K have been measured for films with a thickness of about 5 nm and reaches values approx12 K for 10 nm thick films. A value of the superconducting coherence length of about 4 nm was estimated from the measurements of the second critical magnetic field. High-resolution transmission electron microscopy accompanied with electron-spectroscopy techniques was used to analyze the structure, thickness, and film-substrate interface of fabricated films. The interrelations between fabrication conditions, superconducting and crystalline properties of NbN films on Si substrates are presented and discussed.

Abstract

We present results on superconducting and crystalline properties of NbN films with a thickness smaller than 10 nm. The films were deposited using reactive magnetron sputtering on heated silicon substrates. Zero resistance critical temperatures of about 9 K have been measured for films with a thickness of about 5 nm and reaches values approx12 K for 10 nm thick films. A value of the superconducting coherence length of about 4 nm was estimated from the measurements of the second critical magnetic field. High-resolution transmission electron microscopy accompanied with electron-spectroscopy techniques was used to analyze the structure, thickness, and film-substrate interface of fabricated films. The interrelations between fabrication conditions, superconducting and crystalline properties of NbN films on Si substrates are presented and discussed.

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Additional indexing

Item Type:Journal Article, not refereed, original work
Communities & Collections:07 Faculty of Science > Physics Institute
Dewey Decimal Classification:530 Physics
Language:English
Date:2008
Deposited On:09 Feb 2009 16:40
Last Modified:05 Apr 2016 12:50
Publisher:Institute of Physics Publishing
ISSN:1742-6588
Publisher DOI:https://doi.org/10.1088/1742-6596/97/1/012045

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