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High quality single atomic layer deposition of hexagonal boron nitride on single crystalline Rh(111) four-inch wafers


Hemmi, A; Bernard, C; Cun, H; Roth, S; Klöckner, M; Kälin, T; Weinl, M; Gsell, S; Schreck, M; Osterwalder, J; Greber, T (2014). High quality single atomic layer deposition of hexagonal boron nitride on single crystalline Rh(111) four-inch wafers. Review of Scientific Instruments, 85(3):035101.

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Item Type:Journal Article, refereed, original work
Communities & Collections:07 Faculty of Science > Physics Institute
Dewey Decimal Classification:530 Physics
Language:English
Date:2014
Deposited On:13 Feb 2015 15:20
Last Modified:10 Dec 2017 01:14
Publisher:American Institute of Physics
ISSN:0034-6748
Free access at:Publisher DOI. An embargo period may apply.
Publisher DOI:https://doi.org/10.1063/1.4866648

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