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CMOS-Integrated film bulk acoustic resonators for label-free biosensing


Nirschl, M; Rantala, A; Tukkiniemi, K; Auer, S; Hellgren, A C; Pitzer, D; Schreiter, M; Vikholm-Lundin, I (2010). CMOS-Integrated film bulk acoustic resonators for label-free biosensing. Sensors, 10(5):4180-4193.

Abstract

The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.

Abstract

The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.

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Additional indexing

Item Type:Journal Article, refereed, original work
Communities & Collections:04 Faculty of Medicine > Institute of Biomedical Engineering
Dewey Decimal Classification:170 Ethics
610 Medicine & health
Language:English
Date:2010
Deposited On:26 Jan 2011 14:49
Last Modified:09 Mar 2017 08:39
Publisher:MDPI Publishing
ISSN:1424-8220
Free access at:Publisher DOI. An embargo period may apply.
Publisher DOI:https://doi.org/10.3390/s100504180

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