Header

UZH-Logo

Maintenance Infos

Fabrication and characterization of low aberration micrometer-sized electron lenses


Steinwand, E; Longchamp, J N; Fink, H W (2010). Fabrication and characterization of low aberration micrometer-sized electron lenses. Ultramicroscopy, 110(9):1148-1153.

Abstract

Intrinsic spherical aberrations of electron lenses have been the major resolution limiting factor in electron microscopes for several decades. While effective correctors have recently been implemented, an alternative to correct these aberrations is to circumvent them by scaling down lens dimensions by several orders of magnitude. We have fabricated electrostatic lenses exhibiting one micrometer diameter apertures and evaluated their beam forming properties against predictions from numerical ray tracing simulations. It turns out that it is routinely possible to shape a paraxial low-energy electron beam by such micron-sized lenses. Beam profiles have been measured both at a distant detector as well as in a plane close to the lens. It is shown that the lens can form a parallel beam extending no more than 800 nm from the optical axes at a distance of 200 microm beyond the lens exit. We believe that these findings constitute a prerequisite to derive novel tools for high resolution microscopy using low-energy electrons.

Abstract

Intrinsic spherical aberrations of electron lenses have been the major resolution limiting factor in electron microscopes for several decades. While effective correctors have recently been implemented, an alternative to correct these aberrations is to circumvent them by scaling down lens dimensions by several orders of magnitude. We have fabricated electrostatic lenses exhibiting one micrometer diameter apertures and evaluated their beam forming properties against predictions from numerical ray tracing simulations. It turns out that it is routinely possible to shape a paraxial low-energy electron beam by such micron-sized lenses. Beam profiles have been measured both at a distant detector as well as in a plane close to the lens. It is shown that the lens can form a parallel beam extending no more than 800 nm from the optical axes at a distance of 200 microm beyond the lens exit. We believe that these findings constitute a prerequisite to derive novel tools for high resolution microscopy using low-energy electrons.

Statistics

Citations

6 citations in Web of Science®
8 citations in Scopus®
Google Scholar™

Altmetrics

Downloads

39 downloads since deposited on 03 Feb 2011
4 downloads since 12 months
Detailed statistics

Additional indexing

Item Type:Journal Article, refereed, original work
Communities & Collections:07 Faculty of Science > Physics Institute
Dewey Decimal Classification:530 Physics
Language:English
Date:2010
Deposited On:03 Feb 2011 15:39
Last Modified:05 Apr 2016 14:42
Publisher:Elsevier
ISSN:0304-3991
Publisher DOI:https://doi.org/10.1016/j.ultramic.2010.04.013
PubMed ID:20462698

Download

Preview Icon on Download
Preview
Content: Accepted Version
Filetype: PDF
Size: 8MB
View at publisher

TrendTerms

TrendTerms displays relevant terms of the abstract of this publication and related documents on a map. The terms and their relations were extracted from ZORA using word statistics. Their timelines are taken from ZORA as well. The bubble size of a term is proportional to the number of documents where the term occurs. Red, orange, yellow and green colors are used for terms that occur in the current document; red indicates high interlinkedness of a term with other terms, orange, yellow and green decreasing interlinkedness. Blue is used for terms that have a relation with the terms in this document, but occur in other documents.
You can navigate and zoom the map. Mouse-hovering a term displays its timeline, clicking it yields the associated documents.

Author Collaborations