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Ultra-thin TaN films for superconducting nanowire single-photon detectors


Il’in, K; Hofherr, M; Rall, D; Siegel, M; Semenov, A; Engel, A; Inderbitzin, K; Aeschbacher, A; Schilling, A (2012). Ultra-thin TaN films for superconducting nanowire single-photon detectors. Journal of Low Temperature Physics, 167(5-6):809-814.

Abstract

Ultra-thin films of superconducting tantalum nitride are deposited by reactive magnetron sputtering on heated sapphire substrates. The critical temperature T C=10.25 K is reached for films thicker than 10 nm. A superconducting nanowire single-photon detector in the form of a meander line with a width of 110 nm was made from 5 nm thick TaN film. The detector had a transition temperature of 8.3 K and a critical current density of 4 MA/cm2 at 4.2 K. A photon detection efficiency of 20% has been obtained for the detector with a filling factor of 0.55 at wavelengths up to 700 nm.

Abstract

Ultra-thin films of superconducting tantalum nitride are deposited by reactive magnetron sputtering on heated sapphire substrates. The critical temperature T C=10.25 K is reached for films thicker than 10 nm. A superconducting nanowire single-photon detector in the form of a meander line with a width of 110 nm was made from 5 nm thick TaN film. The detector had a transition temperature of 8.3 K and a critical current density of 4 MA/cm2 at 4.2 K. A photon detection efficiency of 20% has been obtained for the detector with a filling factor of 0.55 at wavelengths up to 700 nm.

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Additional indexing

Item Type:Journal Article, not refereed, original work
Communities & Collections:07 Faculty of Science > Physics Institute
Dewey Decimal Classification:530 Physics
Language:English
Date:2012
Deposited On:31 Jan 2013 15:36
Last Modified:07 Dec 2017 19:05
Publisher:Springer
ISSN:0022-2291
Publisher DOI:https://doi.org/10.1007/s10909-011-0424-3

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