Journal:

Journal of Vacuum Science & Technology A

Journal
Simple data Full metadata
dc.date.accessioned2025-08-18T16:31:11Z
dc.date.available2025-08-18T16:31:11Z
dc.identifier.urihttps://www.zora.uzh.ch/handle/20.500.14742/16280
dc.title

Journal of Vacuum Science & Technology A

dspace.entity.typeJournal
jdb.contract.idAIP2022
jdb.contract.idAIP2023
jdb.contract.idAIP2024
jdb.contract.idAIP2025
jdb.contract.nameAmerican Institute of Physics Journals
jdb.contract.nameAmerican Institute of Physics Journals
jdb.contract.nameAmerican Institute of Physics Journals
jdb.contract.nameAmerican Institute of Physics (AIP) Journals
jdb.contract.urlhttps://avs.scitation.org/toc/jva/current
jdb.contract.urlhttps://avs.scitation.org/toc/jva/current
jdb.contract.url#PLACEHOLDER_PARENT_METADATA_VALUE#
jdb.contract.url#PLACEHOLDER_PARENT_METADATA_VALUE#
jdb.contract.validity01.01.2022 - 31.12.2022
jdb.contract.validity01.01.2023-31.12.2023
jdb.contract.validity01.01.2024-31.12.2024
jdb.contract.validity01.01.2025-31.12.2025
jdb.journal.contractAvailableTrue
jdb.journal.datestamp2016-07-06 13:35:00
jdb.journal.doajStatusNo, journal is not listed in DOAJ.
jdb.journal.freeaccessatdoiFalse
jdb.journal.isoabbreviationJ Vac Sci Technol A
jdb.journal.issn-e1520-8559
jdb.journal.issn-l0734-2101
jdb.journal.issn-p0734-2101
jdb.journal.itemstatusarchive
jdb.journal.jdbid35996
jdb.journal.lastmod2025-07-20 00:15:13
jdb.journal.nlmid9890566
jdb.journal.publicationtypejournal
jdb.journal.publisherid435
jdb.journal.publishernameAmerican Institute of Physics
jdb.journal.publisherstatementFor published Version: Copyright (year) AIP Publishing. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in (citation of published article) and may be found at (https://doi.org/[doi]).
jdb.journal.refereedYes
jdb.journal.srid14745
jdb.journal.srishybridYes
jdb.journal.statuschanged2016-07-06 13:35:00
jdb.journal.titleJournal of Vacuum Science & Technology A
jdb.oapermission.allowedYes
jdb.oapermission.allowedYes
jdb.oapermission.allowedAdditionalfee
jdb.oapermission.articleversionAccepted
jdb.oapermission.articleversionPublished
jdb.oapermission.articleversionPublished
jdb.oapermission.conditionsPublisher copyright and source must be acknowledged with set statement (see policy) Must link to published version
jdb.oapermission.conditionsMust link to published version Publisher copyright and source must be acknowledged with set statement (see policy)
jdb.oapermission.conditionsPublisher source must be acknowledged with citation
jdb.oapermission.copyrightowner#PLACEHOLDER_PARENT_METADATA_VALUE#
jdb.oapermission.copyrightowner#PLACEHOLDER_PARENT_METADATA_VALUE#
jdb.oapermission.copyrightownerAuthors
jdb.oapermission.embargo#PLACEHOLDER_PARENT_METADATA_VALUE#
jdb.oapermission.embargo12 Months
jdb.oapermission.embargo#PLACEHOLDER_PARENT_METADATA_VALUE#
jdb.oapermission.license#PLACEHOLDER_PARENT_METADATA_VALUE#
jdb.oapermission.license#PLACEHOLDER_PARENT_METADATA_VALUE#
jdb.oapermission.licenseCC BY
jdb.oapermission.srpolicyid7
jdb.oapermission.srpolicyid7
jdb.oapermission.srpolicyid7
jdb.publisher.sroverwriteYes
jdb.url.typeSharing Content Online
jdb.url.typeAuthor Select
jdb.url.typeAIP Publishing Policy for NIH/PubMed Central
jdb.url.urlhttps://publishing.aip.org/resources/researchers/rights-and-permissions/sharing-content-online/
jdb.url.urlhttps://publishing.aip.org/resources/researchers/open-science/
jdb.url.urlhttps://publishing.aip.org/resources/researchers/rights-and-permissions/pubmed-central/
uzh.publication.citationJournal of Vacuum Science & Technology A. (n.d.).
uzh.publication.citationJournal of Vacuum Science & Technology A. (n.d.).
Publication available in collections:
Journals