Publication: High quality single atomic layer deposition of hexagonal boron nitride on single crystalline Rh(111) four-inch wafers
High quality single atomic layer deposition of hexagonal boron nitride on single crystalline Rh(111) four-inch wafers
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Hemmi, A., Bernard, C., Cun, H., Roth, S., Klöckner, M., Kälin, T., Weinl, M., Gsell, S., Schreck, M., Osterwalder, J., & Greber, T. (2014). High quality single atomic layer deposition of hexagonal boron nitride on single crystalline Rh(111) four-inch wafers. Review of Scientific Instruments, 85(3), 035101. https://doi.org/10.1063/1.4866648
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Creators (Authors)
- Hemmi, A
- Bernard, C
- Cun, H
- Roth, S
- Klöckner, M
- Weinl, M
- Gsell, S
- Schreck, M
- Osterwalder, J
- Greber, T
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Citations
Hemmi, A., Bernard, C., Cun, H., Roth, S., Klöckner, M., Kälin, T., Weinl, M., Gsell, S., Schreck, M., Osterwalder, J., & Greber, T. (2014). High quality single atomic layer deposition of hexagonal boron nitride on single crystalline Rh(111) four-inch wafers. Review of Scientific Instruments, 85(3), 035101. https://doi.org/10.1063/1.4866648
