Publication: Ultra-thin TaN films for superconducting nanowire single-photon detectors
Ultra-thin TaN films for superconducting nanowire single-photon detectors
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Il’in, K., Hofherr, M., Rall, D., Siegel, M., Semenov, A., Engel, A., Inderbitzin, K., Aeschbacher, A., & Schilling, A. (2012). Ultra-thin TaN films for superconducting nanowire single-photon detectors. Journal of Low Temperature Physics, 167(5–6), 809–814. https://doi.org/10.1007/s10909-011-0424-3
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Ultra-thin films of superconducting tantalum nitride are deposited by reactive magnetron sputtering on heated sapphire substrates. The critical temperature T C=10.25 K is reached for films thicker than 10 nm. A superconducting nanowire single-photon detector in the form of a meander line with a width of 110 nm was made from 5 nm thick TaN film. The detector had a transition temperature of 8.3 K and a critical current density of 4 MA/cm2 at 4.2 K. A photon detection efficiency of 20% has been obtained for the detector with a filling fa
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- Il'in, K
- Hofherr, M
- Rall, D
- Siegel, M
- Semenov, A
- Engel, A
- Inderbitzin, K
- Aeschbacher, A
- Schilling, A
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Il’in, K., Hofherr, M., Rall, D., Siegel, M., Semenov, A., Engel, A., Inderbitzin, K., Aeschbacher, A., & Schilling, A. (2012). Ultra-thin TaN films for superconducting nanowire single-photon detectors. Journal of Low Temperature Physics, 167(5–6), 809–814. https://doi.org/10.1007/s10909-011-0424-3
