Publication: CMOS-Integrated film bulk acoustic resonators for label-free biosensing
CMOS-Integrated film bulk acoustic resonators for label-free biosensing
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Nirschl, M., Rantala, A., Tukkiniemi, K., Auer, S., Hellgren, A. C., Pitzer, D., Schreiter, M., & Vikholm-Lundin, I. (2010). CMOS-Integrated film bulk acoustic resonators for label-free biosensing. Sensors, 10, 4180–4193. https://doi.org/10.3390/s100504180
Abstract
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Abstract
The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.
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- Nirschl, M
- Rantala, A
- Tukkiniemi, K
- Auer, S
- Hellgren, A C
- Pitzer, D
- Schreiter, M
- Vikholm-Lundin, I
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Nirschl, M., Rantala, A., Tukkiniemi, K., Auer, S., Hellgren, A. C., Pitzer, D., Schreiter, M., & Vikholm-Lundin, I. (2010). CMOS-Integrated film bulk acoustic resonators for label-free biosensing. Sensors, 10, 4180–4193. https://doi.org/10.3390/s100504180
