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Design and implementation of a micron-sized electron column fabricated by focused ion beam milling


Wicki, Flavio; Longchamp, Jean-Nicolas; Escher, Conrad; Fink, Hans-Werner (2016). Design and implementation of a micron-sized electron column fabricated by focused ion beam milling. Ultramicroscopy, 160:74-79.

Abstract

We have designed, fabricated and tested a micron-sized electron column with an overall length of about 700 microns comprising two electron lenses; a micro-lens with a minimal bore of 1 micron followed by a second lens with a bore of up to 50 microns in diameter to shape a coherent low-energy electron wave front. The design criteria follow the notion of scaling down source size, lens-dimensions and kinetic electron energy for minimizing spherical aberrations to ensure a parallel coherent electron wave front. All lens apertures have been milled employing a focused ion beam and could thus be precisely aligned within a tolerance of about 300 nm from the optical axis. Experimentally, the final column shapes a quasi-planar wave front with a minimal full divergence angle of 4 mrad and electron energies as low as 100 eV.

Abstract

We have designed, fabricated and tested a micron-sized electron column with an overall length of about 700 microns comprising two electron lenses; a micro-lens with a minimal bore of 1 micron followed by a second lens with a bore of up to 50 microns in diameter to shape a coherent low-energy electron wave front. The design criteria follow the notion of scaling down source size, lens-dimensions and kinetic electron energy for minimizing spherical aberrations to ensure a parallel coherent electron wave front. All lens apertures have been milled employing a focused ion beam and could thus be precisely aligned within a tolerance of about 300 nm from the optical axis. Experimentally, the final column shapes a quasi-planar wave front with a minimal full divergence angle of 4 mrad and electron energies as low as 100 eV.

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Additional indexing

Item Type:Journal Article, refereed, original work
Communities & Collections:07 Faculty of Science > Physics Institute
Dewey Decimal Classification:530 Physics
Language:English
Date:2016
Deposited On:25 Jan 2016 14:21
Last Modified:19 Aug 2018 01:28
Publisher:Elsevier
ISSN:0304-3991
OA Status:Green
Publisher DOI:https://doi.org/10.1016/j.ultramic.2015.09.013
Project Information:
  • : FunderSNSF
  • : Grant IDPZ00P2_148084
  • : Project TitleCoherent Diffraction Imaging of Graphene-Supported Single Biomolecules at Atomic Resolution
  • : FunderSNSF
  • : Grant ID200021_150049
  • : Project TitleExploring the Resolution Limit of Coherent Low-Energy Electron Diffraction Microscopy

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