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Self-assembly nanostructured gold for high aspect ratio silicon microstructures by metal assisted chemical etching


Romano, Lucia; Kagias, M; Jefimovs, K; Stampanoni, M (2016). Self-assembly nanostructured gold for high aspect ratio silicon microstructures by metal assisted chemical etching. RSC Advances, 6(19):16025-16029.

Abstract

Self-assembly gold nanostructured membranes are created to mechanically stabilize the catalyst movement during metal assisted chemical etching. This results in an improved vertical control of the etching profile for high aspect ratio silicon microstructures. The new method is a robust and cheap microfabrication for dense micro-patterns on a large area, such as diffraction gratings for hard X-ray phase contrast imaging and metrology.

Abstract

Self-assembly gold nanostructured membranes are created to mechanically stabilize the catalyst movement during metal assisted chemical etching. This results in an improved vertical control of the etching profile for high aspect ratio silicon microstructures. The new method is a robust and cheap microfabrication for dense micro-patterns on a large area, such as diffraction gratings for hard X-ray phase contrast imaging and metrology.

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Additional indexing

Item Type:Journal Article, refereed, original work
Communities & Collections:04 Faculty of Medicine > Institute of Biomedical Engineering
Dewey Decimal Classification:170 Ethics
610 Medicine & health
Scopus Subject Areas:Physical Sciences > General Chemistry
Physical Sciences > General Chemical Engineering
Language:English
Date:2016
Deposited On:06 Dec 2016 14:27
Last Modified:26 Jan 2022 10:36
Publisher:Royal Society of Chemistry
ISSN:2046-2069
OA Status:Closed
Free access at:Publisher DOI. An embargo period may apply.
Publisher DOI:https://doi.org/10.1039/c5ra24947c

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