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Force controlled SU-8 micropipettes fabricated with a sideways process


Han, Hana; Martinez, Vincent; Aebersold, Mathias J; Lüchtefeld, Ines; Polesel-Maris, Jérôme; Vörös, János; Zambelli, Tomaso (2018). Force controlled SU-8 micropipettes fabricated with a sideways process. Journal of Micromechanics and Microengineering, 28(9):095015.

Abstract

We established an in-plane microfabrication process of polymeric AFM micropipettes that include a microchannel with an aperture at the apex without further processing after wafer scale lithography. The channel was obtained by etching a sacrificial electrochemically plated copper layer. Such sideways fabrication scheme offers the possibility of designing various types of cantilevers with different shapes and lengths within a single wafer, such as a length of 500 µm or being connected by two triangular hollow tips. The probes were operated in optical beam deflection AFM mode. First, force-indentation curves were measured on substrates with different stiffness, and then microbeads were spatially manipulated in a hydrogel showing their reusability in case of clogging. Finally, we succeeded in using such probes to carry out cell-isolation experiments of neurons cultured in vitro (2D layers) and in hydrogels (3D architecture).

Abstract

We established an in-plane microfabrication process of polymeric AFM micropipettes that include a microchannel with an aperture at the apex without further processing after wafer scale lithography. The channel was obtained by etching a sacrificial electrochemically plated copper layer. Such sideways fabrication scheme offers the possibility of designing various types of cantilevers with different shapes and lengths within a single wafer, such as a length of 500 µm or being connected by two triangular hollow tips. The probes were operated in optical beam deflection AFM mode. First, force-indentation curves were measured on substrates with different stiffness, and then microbeads were spatially manipulated in a hydrogel showing their reusability in case of clogging. Finally, we succeeded in using such probes to carry out cell-isolation experiments of neurons cultured in vitro (2D layers) and in hydrogels (3D architecture).

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Additional indexing

Item Type:Journal Article, not_refereed, original work
Communities & Collections:04 Faculty of Medicine > Institute of Biomedical Engineering
Dewey Decimal Classification:170 Ethics
610 Medicine & health
Uncontrolled Keywords:Mechanical Engineering, Electrical and Electronic Engineering, Mechanics of Materials, Electronic, Optical and Magnetic Materials
Language:English
Date:1 September 2018
Deposited On:05 Mar 2019 16:27
Last Modified:05 Mar 2019 16:27
Publisher:IOP Publishing
ISSN:0960-1317
OA Status:Closed
Publisher DOI:https://doi.org/10.1088/1361-6439/aac83c
Project Information:
  • : FunderSNSF
  • : Grant ID200021_165651
  • : Project TitlePiezoresistive microchanneled SU-8 cantilevers using silver nanowires for increased detection sensitivity toward an automated multipipette tool

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