Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium

Vila-Comamala, Joan; Romano, Lucia; Guzenko, Vitaliy; Kagias, Matias; Stampanoni, Marco; Jefimovs, Konstantins (2018). Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium. Microelectronic Engineering, 192:19-24.

Additional indexing

Item Type:	Journal Article, refereed, original work
Communities & Collections:	04 Faculty of Medicine > Institute of Biomedical Engineering
Dewey Decimal Classification:	170 Ethics 610 Medicine & health
Scopus Subject Areas:	Physical Sciences > Electronic, Optical and Magnetic Materials Physical Sciences > Atomic and Molecular Physics, and Optics Physical Sciences > Condensed Matter Physics Physical Sciences > Surfaces, Coatings and Films Physical Sciences > Electrical and Electronic Engineering
Uncontrolled Keywords:	Electrical and Electronic Engineering, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Surfaces, Coatings and Films, Condensed Matter Physics
Language:	English
Date:	1 May 2018
Deposited On:	06 Mar 2019 13:12
Last Modified:	20 Mar 2025 02:36
Publisher:	Elsevier
ISSN:	0167-9317
OA Status:	Closed
Publisher DOI:	https://doi.org/10.1016/j.mee.2018.01.027
Project Information:	Funder: SNSF Grant ID: CR23I3_159263 Project Title: X-ray phase-contrast micro computed tomography for improved pathology