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Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium


Vila-Comamala, Joan; Romano, Lucia; Guzenko, Vitaliy; Kagias, Matias; Stampanoni, Marco; Jefimovs, Konstantins (2018). Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium. Microelectronic Engineering, 192:19-24.

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Item Type:Journal Article, refereed, original work
Communities & Collections:04 Faculty of Medicine > Institute of Biomedical Engineering
Dewey Decimal Classification:170 Ethics
610 Medicine & health
Uncontrolled Keywords:Electrical and Electronic Engineering, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Surfaces, Coatings and Films, Condensed Matter Physics
Language:English
Date:1 May 2018
Deposited On:06 Mar 2019 13:12
Last Modified:25 Sep 2019 00:23
Publisher:Elsevier
ISSN:0167-9317
OA Status:Closed
Publisher DOI:https://doi.org/10.1016/j.mee.2018.01.027
Project Information:
  • : FunderSNSF
  • : Grant IDCR23I3_159263
  • : Project TitleX-ray phase-contrast micro computed tomography for improved pathology

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